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CAS No. 3982-82-9, Diffusion pump fluids; 1,3,3,5-Tetramethyl-1,1,5,5-tetraphenyltrisiloxane; phenylmethylsiloxane oligomer
It is widely used in high vacuum diffusion pumps to provide high performance and high content diffusion pump oil. It has high thermal oxidation stability, small viscosity coefficient, narrow boiling point range, steep vapor pressure curve, low vapor pressure at room temperature, low freezing point, and its chemical stability, non-toxic, odorless, non-corrosive, so it is widely used.
