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CAS 3390-61-2 Silicone Vacuum Pump Oil Application Notes
CAS 3390-61-2 corresponds to pentaphenyltrimethyltrisiloxane, a high-phenyl-content silicone fluid. It is a diffusion pump oil specifically designed for ultra-high vacuum applications, possessing extremely low saturated vapor pressure, excellent thermal stability, oxidation resistance, and chemical inertness. It is primarily used as the working medium for ultra-high vacuum diffusion pumps.
In the electronics and semiconductor industry, this oil is widely used in processes such as vacuum coating, semiconductor wafer processing, vacuum packaging of electronic devices, and vacuum tube fabrication. It stably maintains an ultra-high vacuum environment, preventing oil contamination of components and ensuring coating cleanliness and product performance.
In the optical industry, it is suitable for vacuum antireflection coating and high-reflection coating deposition processes for optical lenses, filters, mirrors, and other components. Relying on a stable high vacuum level, it ensures film uniformity and optical precision, meeting the production needs of high-precision optical components.
In vacuum metallurgy and special materials preparation, it can be used for vacuum melting of refractory metals, vacuum sintering of metal powders, and vacuum preparation of superconducting and magnetic materials. It operates stably in high-temperature vacuum environments, helping to remove material impurities and improve material purity and mechanical properties.
In the field of precision scientific instruments, as a diffusion pump working fluid for mass spectrometers, electron microscopes, particle physics equipment, and molecular beam epitaxy equipment, it provides a stable ultra-high vacuum background, ensuring detection accuracy and experimental reliability.
In aerospace and special industries, it can be used in space simulators, vacuum testing of spacecraft components, and high-temperature vacuum heat treatment, withstanding extreme conditions and maintaining long-term stable operation of vacuum systems.
This oil also features high temperature resistance, resistance to coking, low oil return rate, and compatibility with most metallic and non-metallic materials. It can reduce vacuum system contamination, extend equipment maintenance cycles, and is suitable for various vacuum conditions with stringent requirements for vacuum level, thermal stability, and cleanliness.
